Performance characteristics
It is suitable for fine line production, and the Substractive process can reach 30 / 30um line production
Compared with mSAP process, the cost is low, there is no need to increase equipment investment
Compared with mSAP process, the process is simple, compatible with the existing process
Mature formula, stable process, fine circuit and high yield
Treatment effect
EF=3.8 Before adding revetment After adding revetment EF=9.0
SCAN